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ITO Target

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ITO Target

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Product Description

ITO靶材(ITO Target)

Purity N

Density
g/cm3

Resistivity
Ω • mm2/m

modulus of elasticity
GPa

Coefficient of thermal expansion

thermal diffusion

specific heat

Thermal conductivity

T•℃

10-6 • ℃-1

T, •℃

10-6m2•8-1

I•Rg-1•℃

W•m-1•℃-1

≥ 4N

≥ 7.08

2.804

169.7

20-100

6.6

25

4.86

421

14.5

 

 

 

 

20-200

7.0

50

4.70

422

14.0

 

 

 

 

20-300

7.2

100

4.11

423

13.2

 

 

 

 

20-400

7.5

200

3.96

426

11.9

 

 

 

 

20-500

7.7

300

3.66

429

11.1

 

 

 

 

20-600

7.9

400

3.52

431

10.8

 

 

 

 

 

 

500

3.54

434

10.9

 

 

 

 

 

 

600

3.71

437

11.5

The company can produce various specifications of flat targets and cylindrical targets according to user requirements. The maximum size of flat targets is 380*200, and the thickness can be manufactured according to customer requirements. The inner and outer diameters and height of cylindrical targets can be manufactured according to customer requirements, such as: the height of cylindrical targets with a diameter of φ90*φ78 can reach more than 60mm.